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The method of maintaining positive pressure in cleanroom and its determination principle of temperature and humidity

Nov 16, 2018

In order to maintain the positive pressure in the purification room, not only the residual pressure valve should be installed, but also the wall on the downwind side of the purification room. The opening degree of the residual pressure valve should be adjusted in advance, and the positive pressure value should be maintained by opening and closing the residual pressure valve. And control the volume of air supply to make it larger than the return air volume.


Of course, users can also maintain positive pressure in the purification room by installing an open multi-leaf regulating valve on the return air outlet or branch air pipeline. This method is simple and convenient, but the accuracy is not as high as that of the remaining pressure valve. Or the air damper layer is installed at the return air outlet. The material of the damper layer includes nylon yarn, nylon screen, medium-fine porous foam plastics soaked in alkali solution, non-woven fabrics and so on. That is to say, the indoor positive pressure increases gradually by increasing the resistance of the return air damper layer. But this method is only suitable for corridor or air return.


In addition to positive pressure, the temperature and humidity of the purification room are mainly determined according to the technological requirements, but under the conditions of meeting the technological requirements, people's comfort should be taken into account. With the improvement of air cleanliness requirement, the requirement of temperature and humidity for process is becoming more and more stringent. Specific process requirements for temperature will be listed later, but as a general principle, because the processing accuracy is more and more fine, so the requirements for the range of temperature fluctuation are becoming smaller and smaller.https://www.wxrfcleanroom.com/